Natural Gases
Liquefied natural gas
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Doping mixture
Component/Formula
Trimethyl boron gas mixture
Packing
47L
Purity(%)Impurities(ppm)
0.5-2%Trimethyl boron Hydrogen balance gas
Gas Safety instructions:
Details
三甲基硼(TMB)是一种易自燃、无色、有毒气体。被用作稳定的硼原料,用于硼及碳的沉积或用于BPSG沉积,通常以液化气的形式运输。
主要用于有机合成,应用在太阳能、半导体等行业中。